Beilstein J. Nanotechnol.2012,3, 65–74, doi:10.3762/bjnano.3.8
been demonstrated to provide promising new approaches to nonlinearlaserprocessing. Most notably, because of their ultrathin nature, indirect excitation mechanisms can be exploited in order to fabricate subwavelength structures. In photothermal processing, for example, microfocused lasers are used to
substrate on the overall patterning process and provide new perspectives in photothermal laser patterning of ultrathin organic coatings.
Keywords: femtosecond lasers; nonlinearlaserprocessing; self-assembled monolayers; subwavelength patterning; ultrathin resists; Introduction
In the past decades, self
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Figure 1:
Schematic diagram of the process flow: (a) SAM formation upon immersion in an ethanolic solution of...